:: Home       :: Contact Us       :: Feedback       :: Site Map  
3000 Series
| About Us | Product | Services | Parts List | News |
   
June 2006
SERT Systems establishes internet presence.

Press Release

 
   
June 2006
Shutter Interlock Upgrade for the Varian 3000 Series Sputter System.

Press Release

 
   
   
Our Vision
SERT Systems' Vision centers around one thing - Our Customers.

SERT Systems' Employees ensure that each customer's needs are met, whether it be Service oriented or Quality Replacement Parts.

Let SERT Systems go to work for your company.

 
   

Search for:


 

Varian Semiconductor 3290/3280/3190/3180 Replacement Parts

Key Benefits of working with SERT Systems:

 

  •   Guaranteed OEM Parts
  •   Prompt Customer Service
  •   Extensive Parts Listing of hard to locate items

 

Pricing :

 

Description

OEM P/N

Photo

Price

Valve, Pneumatic, BTA 00-677596-00 Inquire
Outer Pole Piece 00-672313-00   Inquire
Switch, Flow, 2.5 GPM 00-684433-01   Inquire
Valve, Pneumatic, NW-40 00-678254-01 Inquire
Aspirator Pump 00-670615-00   Inquire
12KW ARC Suppression Assy. 04-718808-03 Inquire
Master Interconnect 04-712084-03 Inquire
Chassis, Interlock Status 04-714036-01 Inquire
880RS Ion Gauge Controller 04-705710-01 Inquire
Shield, Pressure Plate Cavity 00-680574-00   Inquire
Shield, Outer 00-682938-00   Inquire
Tool, Chamber Liner 04-722377-01   Inquire
Ceramic Ring 00-682216-01   Inquire
Vacuum System Controller 00-684984-00 Inquire
Cable Assembly, 50' Etch 00-666435-01   Inquire
Cable, 3KWh-MIC 04-716178-01   Inquire
PCB, Analog 00-135359-00   Inquire
Master Controller, Fluke 1722A 00-689807-01 Inquire
Igniter, Low Voltage 04-717628-01   Inquire
PCB, Audio 04-718766-01   Inquire
PCB, GPIB Interface 00-666079-00   Inquire
PCB, Interlock and Control 00-678450-01   Inquire
Rail, Cassette, (Rear) 00-672813-00   Inquire
Switch, H2O Flow, 2.5 GPM 00-684433-02   Inquire
Tube, Flex 28-200704-00   Inquire
PCB, Output Control 00-671786-00   Inquire
PCB, Output Board, A300 00-663527-00   Inquire
PCB, Input Card 32 00-666004-00   Inquire
PCB, Ratio Control 00-680746-00   Inquire
PCB, Power Fail 00-666052-00   Inquire
PCB, 3KW Control 00-686082-00   Inquire
PCB, Relay Driver 00-666291-00   Inquire
PCB, Low Power (83W), Inner 00-681246-00   Inquire
PCB, Low Power (500W) O/P 00-681249-00   Inquire
PCB, Input Board (A200) 00-668529-00   Inquire
PCB, EPROM RAM Memory 00-666241-00   Inquire
PCB, Wafer Status 00-666208-00   Inquire
Source, CONMAG II 00-682799-00 Inquire
Cylinder, Air 00-678319-01   Inquire
Cylinder, Air 27-999664-00   Inquire
Tube, Transition 00-677955-01   Inquire
Heater, DC Bias, 6" 00-682530-03   Inquire
PCB, Indicator 00-684661-00   Inquire
PCB, Power Control 00-666355-00   Inquire
PCB, Reset/Power Fail 00-666409-00   Inquire
PCB, AT Power 00-680719-00   Inquire
Upgrade Kit, Proximity Switch 00-678318-01   Inquire
Feedthru, Electrical 00-681513-00 Inquire
Controller, MKS 250B 00-671311-00   Inquire
Sensor Assembly, Drive Motor 04-716650-00   Inquire
Module, Rectifier, CONMAG     Inquire
Module, SCR Power Pack     Inquire
Pressure Plate, 3190 00-680535-00   Inquire
Trap Assembly 00-685579-00   Inquire
Shield, Front Plate 00-680522-00   Inquire
Weldment, Pressure Plate 00-680869-00   Inquire
Shield, Rear Plate 00-680599-00   Inquire
Shield, Gun Weldment 04-712161-01   Inquire
Shield, Ceramic Ring 00-683707-01 Inquire
Shield, Pressure Plate, Cavity 00-680574-00   Inquire
Outer Pole Piece 00-672313-00   Inquire
Ceramic Clip Rings (150MM) 00-682216-01   Inquire
Shield, Chamber, 3280 00-680656-00   Inquire
PCB, H2O Flow, 0.25 GPM 00-671880-01   Inquire
Insert, Pole Piece 00-682229-00   Inquire
Chain, Wafer Handler, Cass. 04-710791-01   Inquire
EPROMS, 3190 00-678043-01   Inquire
EPROMS, 3290, W. C. 00-678281-01   Inquire
Flow Controller, MKS, 50 sccm 04-719081-01   Inquire
Phase & Mag. Detector ASSY. 00-666315-00   Inquire
CAP ASSY, 100PF VAR 04-706752-01   Inquire
Master Interconnect 04-714229-02   Inquire
Panel, Control, CTI Cryo     Inquire
Ring, Ceramic Clip 04-714076-02   Inquire
Heater ASSY., 125mm DC Bias 00-680924-01 Inquire
Heater ASSY., 150mm DC Bias 00-682530-02 Inquire
Heater ASSY., DC Bias 04-711695-01 Inquire
Seal Door, Heated Option 00-685073-00 Inquire
Motor ASSY., Wafer Handler 00-684049-00   Inquire
Power Supply, Low Voltage 00-685779-01   Inquire
Motor, Gear, Quantum Source 04-707898-04 Inquire
       


Information Request Form

Select the items that apply, and then let us know how to contact you.

  Send Product Literature

  Send Company Literature

  Have a Salesperson contact me

Name
Title
Company
Address
Part #
Request
Email
Phone

 


Copyright ⓒ 2007 SERT Systems, Inc. All rights reserved