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Our
Vision |
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SERT Systems' Vision centers around one
thing -
Our Customers.
SERT Systems' Employees ensure that each
customer's needs are met, whether it be
Service oriented or Quality Replacement
Parts.
Let SERT Systems go to work for your
company. |
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| Varian Semiconductor 3290/3280/3190/3180
Replacement Parts

Key Benefits of working with SERT Systems:
- Guaranteed OEM Parts
- Prompt Customer Service
- Extensive Parts Listing of hard to locate items
Pricing :
| Description |
OEM P/N |
Photo |
Price |
| Valve, Pneumatic, BTA |
00-677596-00 |
 |
Inquire |
| Outer Pole Piece |
00-672313-00 |
|
Inquire |
| Switch, Flow, 2.5 GPM |
00-684433-01 |
|
Inquire |
| Valve, Pneumatic, NW-40 |
00-678254-01 |
 |
Inquire |
| Aspirator Pump |
00-670615-00 |
|
Inquire |
| 12KW ARC Suppression Assy. |
04-718808-03 |
 |
Inquire |
| Master Interconnect |
04-712084-03 |
 |
Inquire |
| Chassis, Interlock Status |
04-714036-01 |
 |
Inquire |
| 880RS Ion Gauge Controller |
04-705710-01 |
 |
Inquire |
| Shield, Pressure Plate Cavity |
00-680574-00 |
|
Inquire |
| Shield, Outer |
00-682938-00 |
|
Inquire |
| Tool, Chamber Liner |
04-722377-01 |
|
Inquire |
| Ceramic Ring |
00-682216-01 |
|
Inquire |
| Vacuum System Controller |
00-684984-00 |
 |
Inquire |
| Cable Assembly, 50' Etch |
00-666435-01 |
|
Inquire |
| Cable, 3KWh-MIC |
04-716178-01 |
|
Inquire |
| PCB, Analog |
00-135359-00 |
|
Inquire |
| Master Controller, Fluke 1722A |
00-689807-01 |
 |
Inquire |
| Igniter, Low Voltage |
04-717628-01 |
|
Inquire |
| PCB, Audio |
04-718766-01 |
|
Inquire |
| PCB, GPIB Interface |
00-666079-00 |
|
Inquire |
| PCB, Interlock and Control |
00-678450-01 |
|
Inquire |
| Rail, Cassette, (Rear) |
00-672813-00 |
|
Inquire |
| Switch, H2O Flow, 2.5 GPM |
00-684433-02 |
|
Inquire |
| Tube, Flex |
28-200704-00 |
|
Inquire |
| PCB, Output Control |
00-671786-00 |
|
Inquire |
| PCB, Output Board, A300 |
00-663527-00 |
|
Inquire |
| PCB, Input Card 32 |
00-666004-00 |
|
Inquire |
| PCB, Ratio Control |
00-680746-00 |
|
Inquire |
| PCB, Power Fail |
00-666052-00 |
|
Inquire |
| PCB, 3KW Control |
00-686082-00 |
|
Inquire |
| PCB, Relay Driver |
00-666291-00 |
|
Inquire |
| PCB, Low Power (83W), Inner |
00-681246-00 |
|
Inquire |
| PCB, Low Power (500W) O/P |
00-681249-00 |
|
Inquire |
| PCB, Input Board (A200) |
00-668529-00 |
|
Inquire |
| PCB, EPROM RAM Memory |
00-666241-00 |
|
Inquire |
| PCB, Wafer Status |
00-666208-00 |
|
Inquire |
| Source, CONMAG II |
00-682799-00 |
 |
Inquire |
| Cylinder, Air |
00-678319-01 |
|
Inquire |
| Cylinder, Air |
27-999664-00 |
|
Inquire |
| Tube, Transition |
00-677955-01 |
|
Inquire |
| Heater, DC Bias, 6" |
00-682530-03 |
|
Inquire |
| PCB, Indicator |
00-684661-00 |
|
Inquire |
| PCB, Power Control |
00-666355-00 |
|
Inquire |
| PCB, Reset/Power Fail |
00-666409-00 |
|
Inquire |
| PCB, AT Power |
00-680719-00 |
|
Inquire |
| Upgrade Kit, Proximity Switch |
00-678318-01 |
|
Inquire |
| Feedthru, Electrical |
00-681513-00 |
 |
Inquire |
| Controller, MKS 250B |
00-671311-00 |
|
Inquire |
| Sensor Assembly, Drive Motor |
04-716650-00 |
|
Inquire |
| Module, Rectifier, CONMAG |
|
|
Inquire |
| Module, SCR Power Pack |
|
|
Inquire |
| Pressure Plate, 3190 |
00-680535-00 |
|
Inquire |
| Trap Assembly |
00-685579-00 |
|
Inquire |
| Shield, Front Plate |
00-680522-00 |
|
Inquire |
| Weldment, Pressure Plate |
00-680869-00 |
|
Inquire |
| Shield, Rear Plate |
00-680599-00 |
|
Inquire |
| Shield, Gun Weldment |
04-712161-01 |
|
Inquire |
| Shield, Ceramic Ring |
00-683707-01 |
 |
Inquire |
| Shield, Pressure Plate, Cavity |
00-680574-00 |
|
Inquire |
| Outer Pole Piece |
00-672313-00 |
|
Inquire |
| Ceramic Clip Rings (150MM) |
00-682216-01 |
|
Inquire |
| Shield, Chamber, 3280 |
00-680656-00 |
|
Inquire |
| PCB, H2O Flow, 0.25 GPM |
00-671880-01 |
|
Inquire |
| Insert, Pole Piece |
00-682229-00 |
|
Inquire |
| Chain, Wafer Handler, Cass. |
04-710791-01 |
|
Inquire |
| EPROMS, 3190 |
00-678043-01 |
|
Inquire |
| EPROMS, 3290, W. C. |
00-678281-01 |
|
Inquire |
| Flow Controller, MKS, 50 sccm |
04-719081-01 |
|
Inquire |
| Phase & Mag. Detector ASSY. |
00-666315-00 |
|
Inquire |
| CAP ASSY, 100PF VAR |
04-706752-01 |
|
Inquire |
| Master Interconnect |
04-714229-02 |
|
Inquire |
| Panel, Control, CTI Cryo |
|
|
Inquire |
| Ring, Ceramic Clip |
04-714076-02 |
|
Inquire |
| Heater ASSY., 125mm DC Bias |
00-680924-01 |
 |
Inquire |
| Heater ASSY., 150mm DC Bias |
00-682530-02 |
 |
Inquire |
| Heater ASSY., DC Bias |
04-711695-01 |
 |
Inquire |
| Seal Door, Heated Option |
00-685073-00 |
 |
Inquire |
| Motor ASSY., Wafer Handler |
00-684049-00 |
|
Inquire |
| Power Supply, Low Voltage |
00-685779-01 |
|
Inquire |
| Motor, Gear, Quantum Source |
04-707898-04 |
 |
Inquire |
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