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Additional
Available Systems
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MRC 662
Sputter System (2
available)
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Currently in Refurbishment Facility
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Current System Configuration:
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Wafer Pallets for 5", 6",
and 8" Wafers and special sizes
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DC and RF Sputter
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RF Etch
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CTI Cryo Pump and
8500 Compressor
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Substrate Heating
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Heated Load Lock Chamber
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MRC 662
Front Panel |
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Open Front
Panel |
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Side View |
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Side View |
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Perkin-Elmer 4450
Sputter System (2
available)
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Currently in Refurbishment Facility
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Current System Configuration:
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Wafer Pallets for 5" and 6" Wafers
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Delta Sources (can be altered to Round
Sources)
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DC Sputtering
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RF Sputtering
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RF Etch and Biased Sputtering
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Automation Package Available
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CTI Cryo Pump and Compressor
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Turbo Pump on Load Lock
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Heated Load Lock Chamber
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Perkin-Elmer 4450
Front Panel |
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Front
Panel |
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Load
Lock Chamber |
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Rear
Panel |
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Tegal Model 901 Oxide Etcher:
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