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Our
Vision |
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SERT Systems' Vision centers around one
thing -
Our Customers.
SERT Systems' Employees ensure that each
customer's needs are met, whether it be
Service oriented or Quality Replacement
Parts.
Let SERT Systems go to work for your
company. |
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| Novellus Concept 1-150/200
Replacement Parts
Key Benefits of working with SERT Systems:
Pricing
| Description |
OEM P/N |
Photos |
Price |
|
Head, Gas Dispersion, Pinned 200mm (Showerhead) |
03-00217-00 |
 |
Inquire |
| PCB, CPU, 8086-2 (TEOS option) |
19-00128-01 |
|
Inquire |
| PCB, RAM/EPROM Memory |
19-00122-00 |
|
Inquire |
| PCB, Motor Indexer, Lift |
19-00125-00 |
|
Inquire |
| PCB, Motor Indexer, Rotation |
19-00124-00 |
|
Inquire |
| PCB, Motor Indexer, Extension |
19-00123-00 |
|
Inquire |
| PCB, ASSY. Power Board |
02-00150-00 |
|
Inquire |
| Fork, Top Plate, 200mm |
15-00702-00 |
|
Inquire |
| Fork, Bottom Plate, 200mm |
15-00700-00 |
|
Inquire |
| Heater Block Assembly, 150mm |
19-00155-01 |
|
Inquire |
| Heater Block Assembly, 200mm |
19-00154-01 |
|
Inquire |
| Air Cylinder, 1-1/8x2-1/2 Stroke |
22-10369-00 |
|
Inquire |
| Heated Injector Manifold (TEOS) |
19-00299-00 |
|
Inquire |
| Screen, Viewport |
17-110412-00 |
|
Inquire |
| Window, Lexan, Viewport |
15-00410-00 |
|
Inquire |
| Generator, HF, ENI OEM-50 |
02-00256-00 |
|
Inquire |
| Generator, LF, ENI PL2-HF |
27-00073-00 |
|
Inquire |
| PCB, Terminal Panel, C1, CVD-D |
02-032615-00 |
|
Inquire |
| Fork, Finger, 7.5" |
15-00699-01 |
|
Inquire |
| Tube ASSY., .007 ID Injector |
10-00424-00 |
|
Inquire |
|
T-Seal, 15/16 ID x 1 3/16 OD |
22-00288-00 |
|
Inquire |
| MFC - (UFC-1100A) |
1 SLM (N2) 2 SLM (N2)
20 SLM (N2)
5 SLM (N2)
5 SLM (NH3)
10 SLM (N2O)
1 SLM (SiH4)
10 SLM (N2)
2 SLM (N2) |
|
Inquire |
| MFC - (UFC-1200A) |
1000sccm (N2) 100sccm (NF3) |
|
Inquire |
| MFC - (UFC-1300) |
2 SLM (N2) 100sccm (CF4)
500sccm (He)
100sccm (CHF3) |
|
Inquire |
| Motor, One-Arm Robot, Lift |
19-00268-00 |
|
Inquire |
| Motor, One-Arm Robot, Extension |
19-00266-00 |
|
Inquire |
| Motor, One-Arm Robot, Rotation |
19-00267-00 |
|
Inquire |
| AdapTorr, Model AC-2 |
27-00009-00 |
|
Inquire |
| Driver, Motor, CX (M57-40) |
27-00082-00 |
|
Inquire |
| Chamber, Gas Distrib., 200mm |
16-00110-00 |
|
Inquire |
| Power Supply, 24V, 8A |
27-00066-00 |
|
Inquire |
| Power Supply, DC, Quad Output |
27-00029-00 |
|
Inquire |
| Fitting, 90 Degree, Elbow, 3/8" |
22-00179-00 |
|
Inquire |
| Ceramic, TC |
15-00567-00 |
|
Inquire |
| Sleeve, Ceramic, TC |
15-00680-00 |
|
Inquire |
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Thermocouple, Type 'J', 1/8" (Omega P/N
ICIN-18U-12) |
27-00010-01 |
|
Inquire |
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Clamp, Chamber Viewport, Short |
15-110413-00 |
|
Inquire |
| Window, Sapphire |
15-110411-00 |
|
Inquire |
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Feedthru, Electrical, Bottom Plate |
19-00056-00 |
|
Inquire |
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Sleeve, Flanged, Heater Feedthru, Ceramic |
15-00578-00 |
|
Inquire |
| Kit, One Arm Robot Seals |
05-00077-00 |
|
Inquire |
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Filter, Backfill (PALL - MCY4463NAEYH13) |
60-00033-00 |
|
Inquire |
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