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Novellus
C1-150 CVD System
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Currently Available - Excellent Condition
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System Configuration and Options:
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Micro-Contamination Kit
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Configured for 6" Wafers
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Single-Arm Robot
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Pentium Computer Controller
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Notched Heater Block
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Front Touch Screen for Operator
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Trazar RF Matching Network
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High and Low Frequency Generators
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External Heated Throttle and Gate Valve
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System can be upgraded and refurbished at
SERT Systems
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Rear
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Load
Lock |
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Rear
View |
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Novellus
Sigma 6 - TEOS Cabinet
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Currently Available - Excellent Condition
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Configured for Doped or Undoped Processes
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First Generation Cabinet Controller
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Electro-Polished Gas Delivery Lines
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Photohelic Gauge Option
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Comes with Necessary Cabling
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System can be upgraded or refurbished at
SERT Systems
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Control
Panel
View |
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Interior |
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Interior |
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