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Concept 2
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June 2006
SERT Systems establishes internet presence.

Press Release
 
   
June 2006
Shutter Interlock Upgrade for the Varian 3000 Series Sputter System.

Press Release
 
   
   
Our Vision
SERT Systems' Vision centers around one thing - Our Customers.

SERT Systems' Employees ensure that each customer's needs are met, whether it be Service oriented or Quality Replacement Parts.

Let SERT Systems go to work for your company.

 
   

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Novellus C2-200 SPEED / Sequel System

Currently Available - Excellent Condition

System Configuration and Options:

  • Configured for 200mm Wafers

  • Software Rev. 2.3.01

  • Dual Load Lock Cassette Module - Hi/Lo Transfer

  • Brooks Dual Blade Robot - MAG 7

  • Primary User Interface located in Cleanroom - System Controller

  • Remote Service Console for Chase Area

  • Dual Module Single Service Drop (SSD) Power Distribution Rack

  • Bottom Facilities Installation

  • Facilities Gas Interlock

 

  • SPEED Chamber Configuration

    • Electrostatic Chuck with Backside Helium Cooling Source

    • Pfeiffer Vacuum TCP600 Turbo and Controller - 2 each

    • 4-Channel Ultra Clean Gas Panel

      • Ar, O2, SiH4, NF3

    • RF Generators

    • Passive Temperature Monitor

 

  • SEQUEL Chamber Configuration

    • Endpoint Detector

    • TEOS with Sigma-6 Duraflo Liquid Injection System

    • 8-Channel Ultra Clean Gas Panel

      • NH3, NO2, SiH4, Freon, N2, O2, Diborane

    • RF Generators

 

      

 

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