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Kilo-Watt
Hour (KWh) Meter Upgrade
The SERT
Systems Kilo-Watt Meter (KWh) Meter Option offers a way
to safely monitor source target usage for processing
wafers. Features of the upgrade include:
FEATURES
The Kilo-Watt Hour (KWh) Meter is capable
of monitoring the KWh usage of three Deposition Source
Power Supplies. There are two main functions of the KWh
Meter:
When the preset value is equal to the
actual KWh measured, the TIME-OUT status display on the
front panel will light and the AT POWER signal for that
source will be disabled until the limit is reset. Some
additional features include:
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Battery back-up of the preset KWh value and the
actual hours accumulated in case of power failure or
system shut down
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Front panel monitoring of Source Power Supply
voltage, current, and power output of the source
being used
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Measurement of Kilo-Watt Hours up to 2000 hours
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Flexibility to set the starting Kilo-Watt Hours to
any value, in case of power loss
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An added key switch that locks out the programming
capability
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Kilo-Watt Hours and Accumulated Hours can be reset
separately
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