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LAM Research
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June 2006
SERT Systems establishes internet presence.

Press Release
 
   
June 2006
Shutter Interlock Upgrade for the Varian 3000 Series Sputter System.

Press Release
 
   
   
Our Vision
SERT Systems' Vision centers around one thing - Our Customers.

SERT Systems' Employees ensure that each customer's needs are met, whether it be Service oriented or Quality Replacement Parts.

Let SERT Systems go to work for your company.

 
   

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LAM Research Available Systems

 

Lam Research 4520 Rainbow Etcher

Available and operational at SERT Systems

    Current Configuration:

  • Configured for 150mm wafers

  • Thru Wall Installation

  • Envision Software ver. E.1.5.2

  • Hine 38A Indexers

  • Standard LAM Gas Panel

  • Photodiode Endpoint Detection – 405 and 520

  • Heated Pumping Manifolds

  • Onboard RF Generators – AE OEM 1250

  • RF Match Type – 853-07415-001

  • Remote AC Box

  • Pump Controller Unit

  • M & W Flowrite Dual Channel Chiller

  • Tylan FC2900M MFC’s

  • Non-ESC Wafer Chuck, Utilizes Edge Ring

                         

LAM Product Request Form

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  Send LAM 4520 Information

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