Novellus

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	June 2006

SERT Systems establishes internet presence.

	June 2006

Shutter Interlock Upgrade for the Varian 3000 Series Sputter System.

Our Vision

SERT Systems' Vision centers around one thing - Our Customers.

SERT Systems' Employees ensure that each customer's needs are met, whether it be Service oriented or Quality Replacement Parts.

Let SERT Systems go to work for your company.

Novellus Refurbishments

The Novellus Systems line of Semiconductor Fabrication Equipment has long been a leader in the Plasma Enhanced Chemical Vapor Deposition (PECVD) and Physical Vapor Deposition (PVD) line of the wafer fabrication processes. SERT Systems, Inc. has centered its Refurbishing Service around that reliability - we have just improved it by totally rebuilding the used legacy system from the frame up and placing a 12 month warranty on it once completed.

A complete explanation of the Refurbishment Process can be viewed by system type by selecting tabs at the top of this page.

The Process:

System located through our inventory or broker
System dismantled, refurbished, and totally rebuilt
Installation completed by our Field Service Engineers
Process Qualification performed
Additional Process Assistance for Customer Recipes
12-Month Parts / Labor Warranty (from time of Acceptance)

Systems Supported and available for Refurbishment:

Concept 1
- 150mm and 200mm Dielectric
Concept 1
- 150mm and 200mm Tungsten
Concept 2
- DLCM
- SPEED
- Sequel
- Altus

Refurbishment Request Form

Select the items that apply, and then let us know how to contact you.

Send Refurbishment Information

Send Concept 1 Information

Send Concept 2 Information

Send Inova Information

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