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Novellus
Refurbishments


The Novellus Systems line of Semiconductor Fabrication Equipment has long
been a leader in the Plasma Enhanced Chemical Vapor Deposition (PECVD) and
Physical Vapor Deposition (PVD) line of
the wafer fabrication processes. SERT Systems, Inc. has centered its
Refurbishing Service around that reliability - we have just improved it
by totally rebuilding the used legacy system from the frame up and placing a 12
month warranty on it once completed.
A complete explanation of the Refurbishment
Process can be viewed by system type by selecting tabs at the top of this page.
The Process:
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System located through
our inventory or broker
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System dismantled, refurbished, and totally rebuilt
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Installation completed by our Field Service Engineers
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Process Qualification performed
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Additional
Process Assistance for Customer Recipes
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12-Month Parts
/ Labor Warranty (from time of
Acceptance)
Systems Supported and available for Refurbishment:

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Concept 1
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Concept 1
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Concept 2
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