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Shutter
Interlock w/ RF Etch Monitor Upgrade
The SERT Systems Shutter Interlock w/ RF Etch
Monitor Option offers two advantages to our
customers:
Shutter Interlock
- monitors the Conmag and Conmag II Shutter
operation and ensures proper opening and closing
during and after deposition times. This prevents
the scrap of production wafers due to improper metal
layers or thicknesses.
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Monitors
the position of the Shutter during open request
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Monitors
the position of the Shutter during close request
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Displays
an alarm on the Fluke or Core Controller in fault
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Requires
repair of Shutters before run restart
RF Etch Monitor - much
like the Shutter Interlock, this option monitors the
RF Etch process and ensures proper operation during
the etch cycle. Improper operation halts the etch
cycle until the fault is repaired and prevents scrap
production wafers.
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Monitors
AT Power and Plasma Signals
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Ensures
complete Etch Cycle is monitored
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Halts
production during a fault
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Requires
repair prior to restart of wafers
Shutter Interlock (Stand
Alone) Upgrade
Same features as the model above, but
without the added RF Etch monitor. This upgrade
was specifically designed for the instance where a
system already has the pre-existing Varian model RF Etch
monitor installed.
-
Monitors
the position of the Shutter during open request
-
Monitors
the position of the Shutter during close request
-
Displays
an alarm on the Fluke or Core Controller in fault
-
Requires
repair of Shutters before run restart
-
Easy
"plug-and-play" design - easy installation
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