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Varian
3290 Sputter System
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Currently at
SERT Systems' Facility - Demonstration Available
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System Configuration:
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Fluke Master Controller
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Analog Heater Controller (Station 1/2/3/4)
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MKS 250B Argon Controllers
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Wafer Process Controller - Z80
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Wafer Loader Controller - Z80
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Varian Vacuum Controller
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Varian 880 Ion Gauge Controller
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Cassette Motor Controller
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RF Matching Network Controller
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CTI-8 Cryopump and Compressor
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Conmag II Deposition Sources
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RF10S Generator
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Leybold/Trivac D65 Rough Pump
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Wafer Size - 150 mm
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Wafer
Handler - 150 mm |
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Rear
Plate |
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Source
Power Supplies |
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Varian
3190 Sputter System
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Currently in Production Facility - Excellent
Condition
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System
Configuration:
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FLUKE Master Controller
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Varian Z80 Wafer and Loader Controller
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Conmag I Deposition Sources
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Configured for 5" Wafers
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CTI Cryo Pump and Compressor
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RF Etch on Station 1
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Excellent Condition
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Complete Set of Chamber Shields
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Power
Supply Rack |
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3190
Rear Panel |
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3190
Rear Panel |
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