Varian m2000/m2i Cluster Sputter System Refurbishment Items:

Mechanical

• The system is stripped completely down to the bare frame.  The same is performed on all included power supply and auxiliary racks.

• All the vacuum components are cleaned according to the manufacturer’s specifications or better.  All chambers and other components are cleaned to remove all residual material.  Chemical cleaning is utilized where necessary.  Sealing surfaces are resurfaced by milling where needed, and then electro polished to reduce the surface area so fewer gas molecules can adhere.

• The system frame, head, electronics assemblies, RF Generator, and all frame and miscellaneous panels are painted to the original manufacturer’s color and quality specification, or to a customer specified color combination.  All controller front panels are repainted and silk-screened.

• All valves are removed and evaluated for operation.  Upon evaluation, each valve is rebuilt or replaced with a newer and more efficient model.

• The mechanical systems with components that wear, such as the wafer handlers, will receive all new components.  All bearings internal or external to the vacuum chambers are replaced.  In general, all consumable parts such as o-rings, drive belts, and other parts that age or wear are replaced.

• We ecommend the use of Ferrofluidic feedthroughs where applicable.  By the use of these seals, the vacuum performance is enhanced dramatically.  Another major benefit is the virtual elimination of all maintenance concerns for these seals.  Ferrofluidic feedthroughs are available as options, either individually or as an entire package.

• Once the system is assembled, a pump-down period is conducted to achieve base vacuum then a mechanical wafer cycling is run.  Each system must cycle a predetermined number of wafers, without error, before it is released from final test.

Vacuum

• The mechanical pumps are sent to the original manufacturers or designated representatives for rebuilding (this allows our customers to receive the manufacturer’s warranty).

• All gate and  slit valves are replaced.

• The entire vacuum system is removed and cleaned.  All o-rings and centering rings are replaced to ensure vacuum integrity.

Plumbing and Process Lines

• All utility panels are removed and serviced with all new components.  New connections are installed and relocated, if needed, for ease of facility connections. 

• Gas line filters are replaced with OEM specified parts or the customer can request a certain brand for a possible additional cost (determined by requested manufacturer).

• All connections are color coded or labeled (i.e. water, CDA, and gas lines) for safety and maintainability.

Controllers and Power Supplies

• All controllers are repaired and tested individually and as part of the system once the assembly process is completed.

• Existing controllers and power supplies can be replaced with newer substitutes if requested.  Quite often, replacements are available that are more reliable and readily available from the OEM without extended lead-times.  These are available as options and are quoted separately.

• SERT Engineers rebuild and replace the wiring harnesses and cables so they more functional and esthetically pleasing with service loops for all components.

• Controllers and peripheral equipment not manufactured by the system OEM are sent back to the original manufacturer for repair and calibration, if needed.

Process

• With regard to process, SERT Systems is prepared to provide a machine which is partially or completely characterized for vacuum, uniformity, and other process parameters which encompass:

  • Vacuum Baseline reference for load lock and main chamber

  • Starting and end vacuum level stability to ensure repeatable films

  • Specific pump-down time

  • Baseline vacuum with pumping curves

  • Gas pressures and flow rate

  • Deposition Rate and Uniformity

• SERT will work closely with your Process Engineers to achieve the desired results before the machine is shipped.